MEMS are miniature (centimeter sized) or microscopic (micron sized) robots and machines. MEMS technology can also be thought of as proto-nanotech because many of the control and software issues faced by MEMS engineers are very similar to those that will be faced by nanotech engineers.
Browsing Memepool, I came across these rather interesting robots developed by MIT and Sandia Labs.
Oh, and I also found this rather interesting article about content oriented page design over at RobotWisdom.